橢圓儀

廠 牌:Specel-2000-vis

代理商:汎達科技股份有限公司

●主要規格:

波長範圍

450nm-900nm

解析度

4nm

光點面積

2mm*4mm

量測薄膜厚度

1nm-5um

膜厚解析度

0.1nm

量測時間

15 sec

量折射率解析度

5*10-3

樣品尺寸

6”

入射角

70°

可否調入射角

X

自動校正

自動測試

可量多層膜厚(三層)

校正片

●服務項目:
    量測透明薄膜厚度、折射率(n)及吸收率(k)值
可量測薄膜種類:
Air-Interface
ASi_GGG_AlGaAs_InGaAs_GaAs
Au Ni Au on Si.
AZO on Silicon
AZO SiN on Sliicon
AZO_SiN_Si
AlZnO
Al_Si(AlSi)
Al2O3 (n,k) on Si
Al2O3 on InP
AlQ3 on Si
AlQ3 (n,k) on Si
Al2O3 on 7059
AlO on Silicon
AlZnO on Silicon
Absorbing Diel on Si
ac sample
Arc on Glass(vis)
amorphous Silicon on 7059
Cauchy on Sellmeier on Si
Cauchy_SiO2(nk) on Si
CH3 on Au
CH3COOH on Au
Cr on Silicon
CuPC on Silicon
Diamond on C(amorph) on Si
Diamond on Si
Diel (Sellmeier) on Si
Diel (Sellmeier) on Si
Diel on BK7
Diel on GaAs
Diel on InP
Diel on ITO on BK7
Diel on ITO on Glass
Diel (Cauchy) on Si
DLC on Glass
GaN on Saf
GGG on GaAs
GGG_GaAs
Hf on Silicon
Ip36
ITO on BK7
ITO(Cauchy) on BK7
ITO on Sodalime
MA205 on Si
MA501 on Si
NPB on Silicon
Neu SiO2 (n,k) on Si
Nit on Ox
Ni,Au on Glass
Nb2O5_Si
Oxide on Ni
PolySilicon on SiO2 on Silicon
PR on Cu
PR (Sellmeier) on Cu
PR on SiO2 on Silicon
poly on cu
Resist (n,k) on Si
Si_AlO on Silicon
Si3N4 on Silicon
Si3N4 on PolySilicon
SiN on SiO2 on ITO
SiNx on Glass
SiN_SiO2_ITO_glass
sin_var_sio2_var_ito_glass_2_0
sinx_sio2_ito-glass
SiO2 (nk) on Si
SiO2 (thick) on Si
SiO2 (thin) on Si
SiO2 on ITO on Glass
SiO2 on ITO on BK7
SiOx on Si Model
SiO2 (nk) on Si
S1813 on ITO on BK7
S1813 on Si
Si_AlO on Si
TCO (nk) on Corning
TCO (nk)_SiO2 on Si
TCO (Sellmeier) on Corning
TCO (Sellmeier) on SiO2 on Si
TiO2 (nk) on Glas
Ti on Silicon
TiO2 on Si
Ti15_Si
Xu_TiO2 on Si
Y2O3 on Silicon
Y2O3 on GaAs
YAlO on Pt
zept520 on Si
ZnO on Glass
ZnO on Si3N4 on Si
ZnO on Si3N4 (Thin) on Si
ZnO on Sodalime
zept520 on Si

●收費標準:

學術單位:20/min+500元開機費
非學術單位:20/min+700元開機費

●負責人:張先生,電話:03-5722644、03-5715131-34048