The equipment of Semiconductor Laboratory021.gif (163069 bytes)
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VLSI/ULSI laboratories have main equipmentJ
1
Oxidation / Diffusion system
2
LPCVD system
3
APCVD system
4
Ion Implantation system
5
Photo Resist Processing & Mask Aligner system
6
Plasma Photo Resist Stripping system
7
E-Gun Evaporation system
8
Sputter system
9
RIE system
10
ECR system
11
RCA cleaning
12
Wet Etching
13
Ultrasonic Cleaning
14
Nanospec
15
4-point probe
16
Eddy meter
17
Microscope & Camera system
18
Photocell & Light Source Spectral Analysis system
19.
Solar Cell I/V characteristics measurement system
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