1
|
Oxidation / Diffusion system
|
2
|
LPCVD system
|
3
|
APCVD system
|
4
|
Ion Implantation system
|
5
|
Photo Resist Processing & Mask Aligner system
|
6
|
Plasma Photo Resist Stripping system
|
7
|
E-Gun Evaporation system
|
8
|
Sputter system
|
9
|
RIE system
|
10
|
ECR system
|
11
|
RCA cleaning
|
12
|
Wet Etching
|
13
|
Ultrasonic Cleaning
|
14
|
Nanospec
|
15
|
4-point probe
|
16
|
Eddy meter
|
17
|
Microscope & Camera system
|
18
|
Photocell & Light Source Spectral Analysis system
|
19.
|
Solar Cell I/V characteristics measurement system
|
