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The environment of Semiconductor Laboratory021.gif (163069 bytes)
The main body of Semiconductor LaboratoryG 
Semiconductor Laboratory have VLSI/ULSI laboratory,  they are Class 100 and Class 10 cleanroom.

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The supporting system of Semiconductor LaboratoryG
Including facility system-DI water process system,  the store tanks  for every kinds of  active gas, air shower, 
the process system for waste gas ,  the process system for waste water, 
the earlier detecting/warning system of  toxic gas.

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