The main body of Semiconductor Laboratory： 

Semiconductor Laboratory have VLSI/ULSI laboratory,  they are Class 100 and Class 10 cleanroom.

The supporting system of Semiconductor Laboratory：

Including facility system-DI water process system,  the store tanks  for every kinds of  active gas, air shower, 

the process system for waste gas ,  the process system for waste water, 

the earlier detecting/warning system of  toxic gas.