The main body of Semiconductor Laboratory¡G
Semiconductor Laboratory have VLSI/ULSI laboratory, they are Class 100 and Class 10 cleanroom.
The supporting system of Semiconductor Laboratory¡G
Including facility system-DI water process system, the store tanks for every kinds of active gas, air shower,
the process system for waste gas , the process system for waste water,
the earlier detecting/warning system of toxic gas.